CVD reactions of TiCl4 with ammonia: a quantum chemical study
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Based on density functional calculations, the mechanism and the energetic course of the chemical vapor deposition (CVD) reaction of TiCl4 with NH3 were studied at the level of B3LYP with 6-311 g(d) basis set. Furthermore, the polymerization processes of dimerization, trimerization and tetramerization were investigated. The calculation results indicate that the formation of polymers is favored at the elimination reaction. On the basis of the calculated energetics, a possible mechanism of the reduction reaction has been proposed.