Volumetric error modeling and compensation of precision measuring platform based on multi-system theory
- 物理技术－已发表论文 
A volumetric error model is proposed according to the working characteristics and the geometric errors of a large-size optical element precision measuring platform. The volumetric error model is based on multi-system theory, and the topological structures of the multi-system theory are described by the number arrays of low-order body. To testify the volumetric error model, a new combined measurement experiment by the application of laser interferometer, double-ball bar, laser displacement sensor and other relative instruments is conducted for measuring the geometric and volumetric errors of the measuring platform before and after error compensation. The error compensation experiments show that the volumetric error is reduced from -70.01~22.14 μm to -4.22~5.8 μm, which also reflects the validity of the volumetric error model.