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dc.contributor.authorWang, B. B.zh_CN
dc.contributor.authorChen, C. C.zh_CN
dc.contributor.authorZheng, K.zh_CN
dc.contributor.authorCheng, Q. J.zh_CN
dc.contributor.authorWang, L.zh_CN
dc.contributor.authorWang, R. Z.zh_CN
dc.contributor.author程其进zh_CN
dc.date.accessioned2015-07-22T07:07:46Z
dc.date.available2015-07-22T07:07:46Z
dc.date.issued2014 MAYzh_CN
dc.identifier.citationMATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2014,21:146-153zh_CN
dc.identifier.otherWOS:000333786400022zh_CN
dc.identifier.urihttps://dspace.xmu.edu.cn/handle/2288/90283
dc.descriptionBeijing Nova Program [Z121103002512017]; Foundation for the Author of National Excellent Doctoral Dissertation of PR China; National Natural Science Foundation of China (NSFC) [11274029, 11074017, 10904001, 51032002]; Fundamental Research Funds for the Central Universities; Program for New Century Excellent Talents in Fujian Province University (NCETFJ)zh_CN
dc.description.abstractCarbon nanofilm and nanodots were grown by plasma-enhanced hot filament chemical vapor deposition using methane, hydrogen and nitrogen as the reactive gases. The results of field emission scanning electron microscopy, micro-Raman spectroscopy and X-ray photoelectron spectroscopy indicate that the amorphous carbon nanofilm and nanodots are formed without and with nitrogen, respectively. The formation of carbon nanofilm and nanodots is the consequence of different sputtering-etching effects. The photoluminescence (PL) of carbon nanofilm and nanodots was studied in a SPEX 1403 Ramalog system using a 325 nm He-Cd laser as an excitation source and the PL spectra show the PL bands centered at about 411 and 513 nm for the carbon nanofilm and 405 and 504 nm for the carbon nanodots. Simultaneously, the PL results also indicate that the intensity of PL bands of carbon nanofilm is lower than that of carbon nanodots. The generation of different PL bands was interpreted by the transition mechanism. The difference in the intensity of PL bands is related to the size of carbon nanodots. The electron field emission (EFE) characteristics of carbon nanofilm and nanodots were investigated in a high-vacuum system. The results show that Fowler-Nordhelm curves are composed of two or three straight lines and the carbon nanofilm can emit a high current density, which originate from the diversification of carbon nanodots. The difference in the EFE results of carbon nanofilm and nanodots is associated to the size and number of carbon nanodots. These results can enrich our knowledge about carbon-based nanomaterials and are important to fabricate the carbon-based solid nanodevices in the field of optoelectronics. (C) 2014 Elsevier Ltd. All rights reserved.zh_CN
dc.language.isoen_USzh_CN
dc.publisherELSEVIER SCI LTDzh_CN
dc.source.urihttp://dx.doi.org/10.1016/j.mssp.2014.02.001zh_CN
dc.subjectELECTRON FIELD-EMISSIONzh_CN
dc.subjectAMORPHOUS-CARBONzh_CN
dc.subjectFILMSzh_CN
dc.subjectPHOTOLUMINESCENCEzh_CN
dc.subjectNANOTUBESzh_CN
dc.subjectRAMANzh_CN
dc.subjectNANOPARTICLESzh_CN
dc.subjectSPECTROSCOPYzh_CN
dc.subjectMECHANISMzh_CN
dc.subjectSURFACEzh_CN
dc.titleComparative study of the carbon nanofilm and nanodots grown by plasma-enhanced hot filament chemical vapor depositionzh_CN
dc.typeArticlezh_CN


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