Research on dual-purpose optical aspheric surface testing instrument - art no 67234Q
- 物理技术－会议论文 
Aiming at various influential factors during ultra-precision aspheric surface testing, besides improving the accuracy of moving stage and measuring probe, systematic errors in measurements should be minimized. In this paper, the principle of measuring, configuration and design of a new type dual-purpose optical aspheric testing instrument are introduced. Both contact and non-contact measurement methods are used. The performance and cost of this dual-purpose instrument are better than single purpose instrument.