Research on key technologies of non-contact measurement system of optical aspheric surface - art no 672359
- 物理技术－会议论文 
According to the requirement of high precision measurement of optical aspheric surface, 4D measurement platform is under development. Open motion control system is adapted and multi-axes motion control card is mounted in IPC. Repeatability accuracy and positioning accuracy of the full travel of the driving unit of the platform can reach to 0.3 mu m and 1 mu m respectively. Laser sensor is droven by the ultrasonic LM (USLM) to the position needed to be tested. The fine positioning of the unit is achieved by USLM with its DC drive mode, which can perform nanometer steps proportional to the input voltages. The positioning error of the driving unit can not be prevented. In this paper, the mathematic model of error compensation of the USLM driving unit is found and software compensation is introduced. Results of compensation show that the position accuracy of this driving unit is greatly improved and can fulfill the task of optical aspheric mirror surface measurement.