Analysis of structure and control of the loop-locked ultra-precise 2D flexible hinge stage for optical measurement - art no 672338
- 物理技术－会议论文 
Although PZT driving stage is a practical and widely used component in optical scanning measurement, its creep, hysteresis, poor long-term stability and the vibration of stage hindered the promotion in driving and positioning accuracy. Based on feedback control, the stage can have nanometer level driving accuracy. For attaching the displacement feedback sensor, a special structure that is called expanded hinge is designed. For getting higher sensitivity, a shallow groove is cut in it. In order to confirm the effect of the additional structure on the performance of the stage, the finite element software is employed, the analysis had been completed, and the simulated results are presented. With the vibration model of the 2D flexible hinge stage, the mathematic model of the vibration control can be achieved, and the PID control system is set up. After the sensors are carefully attached to the corresponding spot and the processing circuit is completed, the simulation and test of the overall performance of the stage can be executed.