Holographic technique of generating large-size mask with hexagonal pattern for photonic crystal LED fabrication
- 物理技术－会议论文 
A simple optical system for generating large-size hexagonal lattice used as the mask for photonic crystal LED fabrication is proposed. The key element in the system is a holographic diffractive optical element consisting of three phase gratings made with holographic means. Under the illumination of a single plane wave, three plane waves can be generated and interfere to form a uniform hexagonal pattern. Theoretical analysis demonstrates that equal intensity of the three plane waves can be obtained if groove depth of the gratings is about 400 nm, which can be achieved by controlling the development time in grating processing. Mask on LED with lattice area up to 15 cm(2) has been obtained with the method.