Differential astigmatic detecting system for discontinuous surface measurement - art no 61504Z
- 物理技术－会议论文 
In the Production of FPC Products, the quality control, which affects the efficiency of the FPC production, is the hard nut to deal. FPC detection consists of the measurement of surface quality, step height and the space of the line. The measurement of the surface quality is incompatible with the dimension measurement. The optical system, which is based on the differential astigmatic measurement, can measure the smooth surface as well as the discontinuous surface, is presented in this paper. The system is tested with resolution of 5nm in roughness measurement, and 50nm in small dimension measurement.