Design of Large-size Aspheric Measurement System and Motion Accuracy Analysis
- 物理技术－会议论文 
A large-size four -axis aspheric measurement system is constructed in the paper. In the system, XYZ axes are driven by linear motors and the rotation axis is based on angular encoder. In order to establish the model of motion error, the motion error of each axis is analyzed. Then by comparing the results of first-order linear compensation and six-order compensation with least square fit, employ the first-order linear compensation as motion accuracy compensation. Finally, apply the measurement system to the symmetric aspheric measuring experiment. Fit the measured data of aspherical surface and obtain the fitting deviation. The experiment results show that this measurement system can meet the accuracy requirement of measuring large-size aspheric surface.