Research on Machining Error Compensation in High-precision Surface Grinding Machine for Optical Aspheric Elements
- 物理技术－会议论文 
Using aspheric component in optical system can correct optical aberration, acquire high imaging quality, improve the optical characteristic, simplify system structure, and reduce system volume. Nowadays, high-precision surface grinding machine is an important approach to processing optical aspheric elements. However, because of the characteristics of optical aspheric elements, the processing method makes a higher demand to whole performance of surface grinding machine, and hardly to achieve ideal machining effect. Taking high generality and efficiency into account, this paper presents a compensation method for machining errors of high-precision surface grinding machine, which bases on optical aspheric elements, to achieve high-precision machining for all kinds of optical aspheric elements. After compensation, the machining accuracy of grinding machine could reach 2um/200x200mm. The research bases on NC surface grinding machine which is self developed. First of all, this paper introduces machining principle for optical aspheric elements on the grinding machine. And then error sources which producing errors are analyzed. By contacting and non-contacting measurement sensors, measurement software which is self designed realizes on-position measure for grinded workpiece, then fits surface precision and machining errors. Through compensation software for machining error which is self designed, compensation algorithm is designed and translated compensation data into G-code for the high-precision grinding machine to achieve compensation machining. Finally, by comparison between machining error compensation before and after processing, the experiments for this purpose are done to validate the compensation machining accuracy.