Method for characterization and simulation of non-axisymmetric aspheric rough surface - art no 672225
Peng, Y. F.
Guo, Y. B.
- 物理技术－会议论文 
This paper presents a method for characterization and simulation of the non-axisymmetric aspheric rough surface. With this characterization procedure, simulation of the rough surface is simplified by decomposing the rough surface into two parts, which are the non-axisymmetric aspheric surface and the only rough component without the ideal surface. Then each component of the divided surface is simulated individually. The rough surface exhibits self-affinity and the fractal number D can be associated with any profile and is scale-invariant, and then the rough surface component is simulated with the Weierstrass - Mandelbrot fractal function. An example for simulating a non-axisymmetric and aspheric rough surface is performed and the flexibility of this characterization method is also discussed.