等离子体辅助的金刚石涂层化学气相沉积工艺及性能研究
Investigation on technologies and performance of PACVD diamond coating
Abstract
金刚石是迄今为止所发现材料中最硬的物质，它具有耐磨性能好、强度高、导热性高强、磨擦系数小、化学稳定性高、透光性强、与有色金属摩擦系数低、抗粘结性好、抗腐蚀性能好等众多优点，在光学、半导体、切削刀具行业中的理想材料并得到广泛运用；而以硬质合金(WC—Co)为基体材料，用砂轮磨削成刀具并在其表面通过CVD法沉积一层金刚石薄膜，在切削非铁材料如石墨、硅铝合金、陶瓷、塑料、木材及各种碳纤维复合材料等工业领域具有广阔的运用市场。 在硬质合金基体表面沉积高质量的金刚石膜层，不但受金刚石沉积条件所限制，而且受硬质合金基体材料、成分、WC颗粒度及钴含量等众多因素相互影响；这些因素与涂层工艺的合理搭配在CVD... Diamond is the world's hardest substance currently known. It exhibits good wear resistance, high strength and thermal conductivity, low friction coefficient, high chemical stability,low friction coefficient and excellent adhesion resistance during maching non-ferrous metals and good corrosion resistance. Such advantages make the diamond widely used in optical, semiconductor and cutting tool indus...