Three-dimensional electrochemical micromachining on metal and semiconductor by confined etchant layer technique (CELT)
Jiang, Li M.
Zu, Yan B.
Tian, Zhao W.
- 化学化工－已发表论文 
We developed a technology for three dimensional (3D) electrochemical micromachining. The confined etchant layer technique (CELT) has been applied to achieve effective three-dimensional (3D) micromachining on different kinds of metals and semiconductors. This technique operates on the basis of indirect electrochemical process, and is a low-cost technique for microfabrication of arbitrary 3D structures in a single step.