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    • Vanadium oxide thin films prepared by RF magnetron sputtering method 

      Guo,DH; Xu,FC; Li,J; Wu,ST; Li,ZS; 徐方成 (SPIE-INT SOC OPTICAL ENGINEERING, 2004)
      The vanadium oxide thin films were prepared by R.F. magnetron sputtering method under different deposition conditions. The microstructures of the samples have been investigated by XRD, XPS, and the Laser Scanning Confocal ...