Browsing 化学化工－会议论文 by Subject "Magnetron sputtering"

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    • Cu-doped V2O5 film as anode in V2O 5/LiPON/LiCoO2 lithium microbattery 

      Zhang, Liangta; Song, Ji; Dong, Quanfen; Wu, Suntao,; 董全峰; 吴孙桃 (IEEE Computer Society, 2011)
      The V2O5 and CuxV2O5 films as the anode of V2O5/LiPON/LiCoO2 lithium microbatteries were prepared by RF magnetron sputtering method. The microbatteries were fabricated by micro electro-mechanical system (MEMS) technology. ...