STUDY ON THE GAS-SENSITIVE EFFECT OF CDIN2O4 THIN-FILMS

Abstract

Transparent and conductive CdIn2O4 (CIO) thin films are prepared by rf reactive sputtering from a Cd-In alloy target in Ar + O2 mixtures. The sensitivity of CdIn2O4 thin film sensors to the LP, CO, H-2, and C2H5OH gas together with their mechanism were studied. The effects of the film deposition conditions to the gas-sensitive effect are also discussed.