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dc.contributor.author豆玉华zh_CN
dc.contributor.author周玉琴zh_CN
dc.contributor.author朱美芳zh_CN
dc.contributor.author宋爽zh_CN
dc.contributor.author刘丰珍zh_CN
dc.contributor.author刘金龙zh_CN
dc.contributor.author张占军zh_CN
dc.contributor.authorDOU Yu-huazh_CN
dc.contributor.authorZHOU Yu-qinzh_CN
dc.contributor.authorZHU Mei-fangzh_CN
dc.contributor.authorSONG Shuangzh_CN
dc.contributor.authorLIU Feng-zhenzh_CN
dc.contributor.authorLIU Jin-longzh_CN
dc.contributor.authorZHANG Zhan-junzh_CN
dc.date.accessioned2013-11-18T07:46:30Z
dc.date.available2013-11-18T07:46:30Z
dc.date.issued2008-11-28zh_CN
dc.identifier.citation电化学,2008,14(04):358-364.zh_CN
dc.identifier.issn1006-3471zh_CN
dc.identifier.urihttps://dspace.xmu.edu.cn/handle/2288/58124
dc.description.abstract分别以氢氧化钠(NaOH)、碳酸钠(Na2CO3)和磷酸钠(Na3PO4.12H2O)作为刻蚀剂,研究刻蚀浓度、温度(θ)、刻蚀时间(te)和添加剂(异丙醇(IPA)、碳酸氢钠(NaHCO3))对晶体硅表面织构化的影响,用场发射扫描电子显微镜表征织构效果.通过优化工艺,可得到较低的平均表面反射率(Rav),按使用的刻蚀剂分别为:9.70%(NaOH)、9.76%(Na2CO3)和8.63%(Na3PO4.12H2O).据此分析了Rav和织构表面形貌之间的关系.发现添加剂IPA在Na3PO4.12H2O或Na2CO3与NaOH 3种刻蚀剂溶液中均可明显起改善织构效果.NaHCO3在某些方面具有与IPA的相同作用,同时又能促进大金字塔的形成.文中同时初步提出有关刻蚀过程的机理.zh_CN
dc.description.abstractThe texturization of(100) crystalline silicon(c-Si) wafer was studied by field-emission scanning electron microscope using different kinds of etchant: sodium hydroxide,sodium carbonate and tribasic sodium phosphate.By optimizing the etching parameters,the lowest values of averaged reflectance(Rav) were obtained to be 9.70% for NaOH,9.76% for Na2CO3 and 8.63% for Na3PO4·12H2O,which is comparable to that of the wafer with textured surface covered with an anti-reflection coating of either silicon nitride or thermally grown silicon dioxide.The relation of Rav and surface morphology of textured wafer was analyzed.Moreover,special emphasis was put on the role of isopropyl alcohol(IPA) and sodium bicarbonate for texturization.It is proved that IPA decreased the etching rate but improved the morphology of the textured surface.It seems that played NaHCO3 played the similar role of IPA but resulted in the formation of large pyramid.The mechanism of texturization by different kinds of etchant was suggested.zh_CN
dc.language.isozhzh_CN
dc.publisher厦门大学《电化学》编辑部zh_CN
dc.relation.ispartofseries研究论文zh_CN
dc.relation.ispartofseriesArticleszh_CN
dc.source.urihttp://electrochem.xmu.edu.cn/CN/abstract/abstract8574.shtmlzh_CN
dc.subject单晶硅zh_CN
dc.subject织构zh_CN
dc.subject碱液zh_CN
dc.subject反射率zh_CN
dc.subject表面形貌zh_CN
dc.subjectcrystalline siliconzh_CN
dc.subjecttexturizationzh_CN
dc.subjectalkalinezh_CN
dc.subjectreflectancezh_CN
dc.subjectsurface morphologyzh_CN
dc.title不同碱液单晶硅表面织构的初步研究(英文)zh_CN
dc.title.alternativeStudy on the Texturization of c-Si Wafers by Different Kinds of Alkaline for Heterojunction Solar Cellszh_CN
dc.typeArticlezh_CN
dc.description.note作者联系地址:中国科学院研究生院;北京太阳能研究所;zh_CN
dc.description.noteAuthor's Address: 1.Graduate University of the Chinese Academy of Sciences,Beijing 100049,China;2.Beijing Solar Energy Institute,Beijing 100083,Chinazh_CN


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