Design and fabrication of a D 33 -mode piezoelectric micro-accelerometer
- 航空航天－已发表论文 
Abstract(#br)In this paper, a D 33 -mode piezoelectric micro-accelerometer with Pb 1.1 (Zr 0.52 Ti 0.48 )O 3 (PZT) thin film is designed, fabricated and tested. Both the polarization and deformation directions of the piezoelectric thin film are horizontal in this structure. With the high sensitivity and natural frequency, the D 33 -mode piezoelectric micro-accelerometer possesses improved practicality. The influence of filling factor ( Γ ) and interdigital electrode width ( b ) on the output voltage is analyzed in this work. The micro-electro-mechanical systems technology is then used to fabricate the piezoelectric accelerometer device, which is based on the Sol–Gel PZT piezoelectric thin film. Performance of the piezoelectric accelerometer micro-devices with the different Γ and b is...