二维薄膜六方氮化硼的生长与刻蚀研究

Abstract

六方氮化硼h-BN俗称“白石墨烯”，因其独特的六角蜂窝原子结构、优异的物理化学性能以及广阔的应用前景引起科学界的广泛关注。目前，二维h-BN薄膜的制备尚处于基础研究阶段。常用的制备方法包括机械/化学剥离法、化学气相沉积法（包括气相外延法和非气相外延法）、离子束溅射沉积法等。目前，高质量h-BN多通过机械剥离法从体材料h-BN晶体获得，但尺寸小，效率低。而其他制备方法合成的二维h-BN晶体质量远远不如剥离的材料。规模化制备高质量、大面积、可控层数的h-BN依然具有较大的难度和挑战性。为此，亟需发展高质量二维h-BN的可控制备技术。化学气相沉积法（CVD）在规模化制备大面积、高质量石墨烯二维材料上...

Hexagonal boron nitride, referred as “white graphene”, is composed of alternating boron and nitrogen atoms in a two-dimensional honeycomb plane. It has attracted intense research interests owing to its unique atomic structure, outstanding physical/chemical properties, and broad application prospects. Currently, various techniques have been explored to synthesize h-BN, including mechanical cleavage...