用于拉曼光谱仪的阵列波导光栅(AWG)工艺改进及与光电探测器的集成技术研究
Processing improvement of arrayed waveguide grating (AWG) and its monolithic integration with photo-detectors
Abstract
色散模块是光谱仪器中的核心部分,传统的色散模块由昂贵的光栅、透镜和CCD组成。随着光谱技术从实验室向工业和日常应用扩展,如何实现光谱仪的低成本、微型化已成为一个重要的课题。阵列波导光栅(AWG)芯片采用波导元件替代传统光栅、透镜的功能,而光电探测器(PD)阵列可取代CCD并与AWG集成在同一块芯片上,因此,AWG和PD的单片集成可实现传统色散模块的功能。 拉曼光谱具有“指纹”特性。不同的物质其拉曼光谱是不同的,可以通过拉曼光谱有效鉴别化学成分,尤其拉曼光谱分析具有快速、非侵入、可通过特征峰同时鉴别混合物中的多种化学成分等优点,在食品安全、环境检测和医疗诊断等领域市场前景广阔。但拉曼光谱仪由于... Optical dispersion module is one of the core components in spectrometers. A traditional optical dispersion module is made up of costly grating, lens and CCD sensors. Nowadays, it has become a major challenge to realize a low cost and miniature optical dispersion module, so that the application of spectrometer could be expanded from lab to industries and ordinary life. The arrayed waveguide grating...