微电磁继电器磁场和力学性质模拟研究
Simulating the magnetic field and mechanical properties of electromagnetic microrelay
摘要
运用有限元分析ANSYS和Mathematica软件对平面线圈的电磁场分布、悬臂梁与固定电极之间的电磁力、悬臂梁应力分布和受力形变等进行了理论分析和仿真模拟,为线圈结构、悬臂梁位置、悬臂梁与线圈距离的设计提供理论依据. Using the finite element analysis software ANSYS and Mathematica,theoretical simulation and analysis were performed to study the electromagnetic field distribution within the planar coil,the electromagnetic force between cantilever and fixed electrode,and the electromagnetic force distribution and deformation of the cantilever.Accordingly,the coil structure,the location of the cantilever and the distance between cantilever and the coil were designed.