Show simple item record

dc.contributor.author李元元
dc.contributor.author蒙庆华
dc.contributor.author陈四海
dc.contributor.author曾毅波
dc.contributor.author郭航
dc.date.accessioned2018-11-26T08:10:34Z
dc.date.available2018-11-26T08:10:34Z
dc.date.issued2017
dc.identifier.citation传感器与微系统,2017,(8):69-
dc.identifier.issn2096-2436
dc.identifier.other10.13873/J.1000-9787(2017)08-0069-03
dc.identifier.urihttps://dspace.xmu.edu.cn/handle/2288/164734
dc.description.abstract通过对微光纤法布里-珀罗(F-P)腔滤波器工作原理的综合分析,确立了微F-P腔滤波器静电驱动腔长调谐方案。对可调谐滤波器的主体部分进行光学设计和; 分析,确立了反射镜的多层薄膜光学结构,并借助ANSYS有限元力电耦合分析,最终选择L型桥臂支撑的腔体结构,可以实现0.625; mum的调谐范围;保持桥面平行的能力很高,可实现高精度的滤波效果;结构稳固,能够抵抗制造时的残余应力。
dc.description.abstractBy comprehensive analysis on working principle of micro F-P cavity; filter,the optimum tuning scheme of micro F-P cavity filter is; established. The main part of the optical structure is designed, a; multilayer film structures of the mirror is established,and with the; help of ANSYS finite element electro-mechanical coupling analysis,L type; bridge arm supported cavity structure is finally established, the; structure can achieve a considerable range of tuning 0.625 mum;; relatively high fill factor,filter light leakage is avoided; the high; ability to keep parallel can achieve high precision filtering effect;; structural stability can resist the residual stress of manufacture.
dc.description.sponsorship深圳市科技计划
dc.language.isozh_CN
dc.subject滤波器
dc.subject调谐
dc.subject反射镜
dc.subject腔体结构
dc.subjectfilter
dc.subjecttuning
dc.subjectmirror
dc.subjectcavity structure
dc.title基于MEMS技术的F-P腔滤波器分析与设计
dc.title.alternativeAnalysis and design of MEMS-based F-P cavity filter
dc.typeArticle


Files in this item

Thumbnail

This item appears in the following Collection(s)

Show simple item record