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dc.contributor.author陈荔群
dc.contributor.author李成
dc.date.accessioned2017-11-14T03:08:49Z
dc.date.available2017-11-14T03:08:49Z
dc.date.issued2006-08-30
dc.identifier.citation半导体学报,2006,(08):138-141
dc.identifier.issn0253-4177
dc.identifier.otherBDTX200608029
dc.identifier.urihttps://dspace.xmu.edu.cn/handle/2288/155787
dc.description.abstractSiGe是间接带隙材料,吸收系数非常小,因而SiGe探测器在红外波段的量子效率很低.本文提出一种新型的探测器结构,即波导共振增强型光电探测器,该器件主要由两个介质布拉格反射镜和波导吸收区构成,器件尺寸较传统波导型探测器大为减小,吸收区的长度不受SiGe临界厚度的限制,实现了量子效率和响应速度的优化.本文在数值模拟的基础上,对器件结构进行了优化设计,结果表明7·6μm长的波导探测器可以得到20%以上的量子效率.
dc.description.abstractWe propose a novel SiGe resonant-cavity-enhanced photodetector that operates at 1.3μm.The device is composed of two Bragg reflectors and a waveguide absorption region.Compared to conventional waveguide photodetectors,the device can be designed with a small enough area for high-speed operation.The limitation of the SiGe critical thickness is circumvented, and the photodetector is expected to have high quantum efficiency.The structure is optimized through numerical simulation and a quantum efficiency of 20% is expected with a 7.6μm-long waveguide.
dc.description.sponsorship福建省青年科技人才创新基金(批准号:2004J021);; 回国留学人员基金;; 集成光电子学国家重点实验室;; 国家自然科学基金(批准号:60336010)资助项目~~
dc.language.isozh_CN
dc.subjectSi/SiGe
dc.subject波导共振增强型
dc.subject探测器
dc.subjectSi/SiGe
dc.subjectresonant-cavity-enhanced waveguide
dc.subjectphotodetector
dc.title硅基波导共振增强型光电探测器的设计与模拟
dc.title.alternativeDesign and Simulation of Si-Based Resonant-Cavity-Enhanced Waveguide Photodetectors
dc.typeArticle


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