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dc.contributor.authorYao, Rongqian
dc.contributor.authorFeng, Zude
dc.contributor.author冯祖德
dc.contributor.authorChen, Lifu
dc.contributor.authorZhang, Ying
dc.contributor.authorZhang, Bingjie
dc.date.accessioned2013-03-06T01:53:43Z
dc.date.available2013-03-06T01:53:43Z
dc.date.issued2012-08
dc.identifier.citationJOURNAL OF THE EUROPEAN CERAMIC SOCIETY,2012,32(10):2565-2571zh_CN
dc.identifier.issn0955-2219
dc.identifier.urihttp://dx.doi.org/10.1016/j.jeurceramsoc.2012.02.004
dc.identifier.uriWOS:000304782600059
dc.identifier.urihttps://dspace.xmu.edu.cn/handle/2288/15063
dc.description.abstractFreestanding SiC(Ti, B) films with high temperature resistance were fabricated from polymer precursor of polycarbosilane (PCS) blended with 0.26 wt% TiN and 0.74 wt% B powders. Results reveal that SiC(Ti, B) films with good mechanical properties are uniform and dense. After high temperature annealing at 1500 degrees C in argon, SiC(Ti, B) films exhibit better high temperature resistance as compared to SiC films without additives, which implies their potential applications in ultra-high temperatures (exceeding 1500 degrees C) microelectromechanical systems (MEMS). Sintering additives are effective in suppressing the growth of SiC crystals and decreasing the content of oxygen and free carbon, which is normally beneficial to enhance high temperature resistance of films. (C) 2012 Elsevier Ltd. All rights reserved.zh_CN
dc.description.sponsorshipScience and Technology Program of Fujian Province [2009H0038]; Fundamental Research Funds for the Central Universities [2010121053]; Aeronautical Science Foundation of China [2011ZF68004]; Specialized Research Fund for the Doctoral Program of Higher Education [20110121120033]zh_CN
dc.language.isoenzh_CN
dc.publisherELSEVIER SCI LTDzh_CN
dc.subjectFilmszh_CN
dc.subjectMicrostructure-finalzh_CN
dc.subjectMechanical propertieszh_CN
dc.subjectSiCzh_CN
dc.subjectMicroelectromechanical systemszh_CN
dc.titlePreparation and characterization of freestanding SiC(Ti, B) films derived from polycarbosilane with TiN and B as additiveszh_CN
dc.typeArticlezh_CN


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