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dc.contributor.author郑志霞
dc.contributor.author冯勇建
dc.date.accessioned2017-11-14T01:29:14Z
dc.date.available2017-11-14T01:29:14Z
dc.date.issued2004-09-25
dc.identifier.citation莆田学院学报,2004,(03):63-66
dc.identifier.issn1008-7885
dc.identifier.otherPTGZ200403014
dc.identifier.urihttps://dspace.xmu.edu.cn/handle/2288/142375
dc.description.abstract介绍一种新型电容式加速度微传感器的结构和原理,并进行受力分析。利用ANSYS进行有限元分析,得出加速度和电容之间的非线性关系,证明了该传感器在工艺设计上的可行性。设计合适的传感器结构参数和MEMS工艺流程,制作出满足不同测量要求、有较高精度的加速度传感器。
dc.description.abstractThe Structure of a new type of capacitive acceleration micro sensor is introduced in this paper. In order to get the nonlinear relationship between the acceleration and capacitive signal, an effective method based on ANSYS was proposed, which explained the feasibility of the fabrication. The structural parameters and the fabrication process were designed to meet different test ranges.
dc.language.isozh_CN
dc.subject加速度
dc.subject微传感器
dc.subjectMEMS工艺
dc.subjectacceleration
dc.subjectmicro sensor
dc.subjectMEMS fabrication
dc.title电容式加速度微传感器
dc.title.alternativeCapacitive Micro Sensor of Acceleration
dc.typeArticle


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