Coupling Effect and the Structural Schematic Design of Decoupled Micromachined Vibrated Gyroscope
- 航空航天－已发表论文 
微机械振动陀螺是近几年发展起来的新型惯性元件 ,其误差源主要有微机械结构的 Brown-ian噪声、电路噪声、机械耦合误差及电子机械耦合误差等 ,这些误差严重影响陀螺仪的精度 .本文提出了单级隔离耦合和双级隔离耦合的结构方案 ,有效减小机械耦合误差 ,提高精度 .Silicon micromachined gyroscope is a new type of inertial sensor developed in recent years, whose error resource often comes from brownian noise, electronic noise, mechanical coupling effects and electromechanical crosstalk , etc. These errors would affect the precision of gyroscope greatly.The structural schemes of the single decoupled and double decoupled were proposed in this paper. The mechanical coupling error could be reduced greatly and be made more precise by applying these types of structure.