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dc.contributor.authorSu, YX
dc.contributor.authorYang, PY
dc.contributor.authorZhou, Z
dc.contributor.authorWang, XR
dc.contributor.author王小如
dc.contributor.authorLi, FM
dc.contributor.authorHuang, BL
dc.contributor.author黄本立
dc.contributor.authorRen, JS
dc.contributor.authorChen, M
dc.contributor.authorMa, HB
dc.contributor.authorZhang, GS
dc.date.accessioned2012-07-22T01:16:34Z
dc.date.available2012-07-22T01:16:34Z
dc.date.issued1998-11-23
dc.identifier.citationSPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY,1998,53(10):1418-1420zh_CN
dc.identifier.issn0584-8547
dc.identifier.urihttp://dx.doi.org/10.1016/S0584-8547(98)00143-8
dc.identifier.urihttps://dspace.xmu.edu.cn/handle/2288/13305
dc.description.abstractThis work evaluates the possibilities of applying microsecond-pulse glow discharge time of flight mass spectrometry (mu s-pulse GD-TOFMS) in surface depth analysis. Investigations have been done for effects of discharge pressure on sputtered depth profiles as well as on topographies under mu s-pulse GD mode; and also for influences of discharge current and discharge frequency on characteristics of sputtered surface. Sputtering rates of several pure metals under mu s-pulse GD and dc-GD modes were studied and compared. The estimated erosion rates are 1.27, 2.90 and 5.18 nm s(-1) for pure Fe, Cu and Zn layer, respectively. Depth profiling were conducted for a technical Zr-Fe layer (about 10 mu m) and for a Fe-Cu layer (about 1 mu m) by mu s-pulse GD. A simple model was developed and utilized to convert ion intensity into element concentration, and the experimental results were presented and discussed. Preliminary results show that mu s-pulse GD-TOFMS has a promising future in the area of surface depth analysis, especially in the depth analysis of thin layers and of their cross-sections. (C) 1998 Elsevier Science B.V. All rights reserved.zh_CN
dc.language.isoenzh_CN
dc.publisherPERGAMON-ELSEVIER SCIENCE LTDzh_CN
dc.subjectmicrosecond pulse glow dischargezh_CN
dc.subjecttime of flight mass spectrometryzh_CN
dc.subjectsurface analysiszh_CN
dc.titleFeasibility of applying microsecond-pulse glow discharge time of flight mass spectrometry in surface depth analysiszh_CN
dc.typeArticlezh_CN


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