Formation of ionic Ta-containing oxides from laser ablation of Ta2O5 in ambient O-2
- 化学化工－已发表论文 
The mass spectra of both positive and negative charged Ta-containing ions from laser ablation of Ta2O5 were measured using a time-of-flight mass spectrometer. Formation of ionic Ta-containing oxides such as TaO3+ and TaO4+ from Ta2O5 ablation in ambient O-2 were observed for the first time.. The influence of ambient O-2 pressure on the intensities of ablated Ta-containing ions has also been studied. It is found that the subsequent oxidation reactions were involved in the ablation of Ta2O5 at different O-2 pressure. The enthalpies of possible oxidation reactions were theoretically calculated, and the possible formation reactions of the;ionic Ta-contaning oxides are discussed.