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dc.contributor.author黄若轩
dc.contributor.author孙鹏
dc.contributor.author朱芳萍
dc.contributor.author祁正兵
dc.contributor.author王周成
dc.date.accessioned2012-06-15T07:15:17Z
dc.date.available2012-06-15T07:15:17Z
dc.date.issued2011-01
dc.identifier.citation西安交通大学学报,2011,45(1):137-140zh_CN
dc.identifier.issn0253-987X
dc.identifier.urihttps://dspace.xmu.edu.cn/handle/2288/12781
dc.description作者简介:黄若轩(1984-),男,硕士生;王周成(联系人),男,教授.zh_CN
dc.description.abstract[中文摘要]利用磁控溅射方法,通过改变氮气流量制备出ZrN纳米涂层,研究了氮气流量对ZrN纳米涂层结构及硬度的影响,并采用表面轮廓仪、X射线衍射仪、扫描电镜及纳米压痕表征了ZrN纳米涂层的厚度、相结构、形貌及硬度.实验结果表明,随着氮气流量增加,涂层厚度减小,涂层择优取向由(111)变为(200),对应的截面形貌由柱状结构变为非柱状结构;传统的位错滑移机制不适用于ZrN纳米涂层的塑性变形,其硬度随择优取向和晶粒尺寸的增大而增加.[英文摘要]The influences of nitrogen flow percentage on microstructure and hardness of ZrN nano-coatings fabricated by DC magnetron sputtering were investigated.The thickness,phase structure,morphology of cross-section and hardness of ZrN nano-coatings were characterized with profilometer,X-ray diffraction,scanning electron microscope and nanoindentation.The results show that the nitrogen flow percentage significantly affects the thickness and phase structure of ZrN nano-coatings.With increasing nitrogen flow percentage,the coating thickness decreases and the phase structure evolves from the orientation(111) to(200),the cross-secction morphology changes from columnar structure to non-columnar structure as well.For the ZrN nano-coating,the dislocation sliding is not the cause for plastic defomation,and the hardness increases with the increasing grain size and preferred orientation.zh_CN
dc.description.sponsorship国家科技支撑计划资助项目(2007BAE05B04)zh_CN
dc.language.isozhzh_CN
dc.publisher《西安交通大学学报》编辑部zh_CN
dc.subject氮化锆zh_CN
dc.subject纳米涂层zh_CN
dc.subject磁控溅射zh_CN
dc.subject取向性zh_CN
dc.subject硬度zh_CN
dc.subjectZrNzh_CN
dc.subjectnano-coatingzh_CN
dc.subjectmagnetron sputteringzh_CN
dc.subjectorientationzh_CN
dc.subjecthardnesszh_CN
dc.title氮气流量对磁控溅射ZrN纳米涂层结构及硬度的影响zh_CN
dc.title.alternativeInfluences of Nitrogen Flow Percentage on Microstructure and Hardness of ZrN Nano-Coatings from Magnetron Sputteringzh_CN
dc.typeArticlezh_CN


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