氮气流量对磁控溅射ZrN纳米涂层结构及硬度的影响

Abstract

[中文摘要]利用磁控溅射方法,通过改变氮气流量制备出ZrN纳米涂层,研究了氮气流量对ZrN纳米涂层结构及硬度的影响,并采用表面轮廓仪、X射线衍射仪、扫描电镜及纳米压痕表征了ZrN纳米涂层的厚度、相结构、形貌及硬度.实验结果表明,随着氮气流量增加,涂层厚度减小,涂层择优取向由(111)变为(200),对应的截面形貌由柱状结构变为非柱状结构;传统的位错滑移机制不适用于ZrN纳米涂层的塑性变形,其硬度随择优取向和晶粒尺寸的增大而增加.[英文摘要]The influences of nitrogen flow percentage on microstructure and hardness of ZrN nano-coatings fabricated by DC magnetron sputtering were investigated.The thickness,phase structure,morphology of cross-section and hardness of ZrN nano-coatings were characterized with profilometer,X-ray diffraction,scanning electron microscope and nanoindentation.The results show that the nitrogen flow percentage significantly affects the thickness and phase structure of ZrN nano-coatings.With increasing nitrogen flow percentage,the coating thickness decreases and the phase structure evolves from the orientation(111) tｏ(200),the cross-secction morphology changes from columnar structure to non-columnar structure as well．For the ZrN nano-coating,the dislocation sliding is not the cause for plastic defomation,and the hardness increases with the increasing grain size and preferred orientation.