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Influence of multi-arc ion plating technique on the interface and microstructure of TiN/Ti and Cr/Cu contact system

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多弧离子镀工艺对TiN_Ti与Cr_Cu界面及微结构的影响.pdf (241.7Kb)
Date
2000
Author
Lin, XH
林秀华
Liu, X
刘新
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  • 化学化工-已发表论文 [14469]
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Abstract
TiN/Ti film was fabricated by deposition on the chromium layer electrodeposited on the copper substrate by means of multi-are ion plating technique under different conditions. The interface formation, microstructure and constituents, and morphology for TiN/Ti and Cr/Cu contact system are investigated using X-ray diffraction (XRD) and scanning electron microscope (SEM) techniques. The XRD measurements showed that in addition to the TiN,Ti2N multi-crystallized phases,there was a lot of Cr-Ti,intermetallic compounds on the surface of TiN/Ti film. It is evident that the Ti2N phase was formed. The SEM observation indicated that the surface film prepared at 90 degreesC, had a structure similar to the form of branches and an inhomogeneous crystallization had occurred. As the temperature was increased to 170 degreesC, the XRD peak intensity became stronger and a fine TiN/Ti surface was obtained.
Citation
ACTA PHYSICA SINICA,2000,49(11):2220-2224
URI
https://dspace.xmu.edu.cn/handle/2288/12772

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