Show simple item record

dc.contributor.authorCheng, X
dc.contributor.authorGu, C
dc.contributor.authorFeng, ZD
dc.contributor.author冯祖德
dc.date.accessioned2012-05-01T02:19:58Z
dc.date.available2012-05-01T02:19:58Z
dc.date.issued2003-01-03
dc.identifier.citationJOURNAL OF THE ELECTROCHEMICAL SOCIETY,2003,150(2):G112-G116zh_CN
dc.identifier.issn0013-4651
dc.identifier.urihttp://dx.doi.org/10.1149/1.1534601
dc.identifier.urihttps://dspace.xmu.edu.cn/handle/2288/12216
dc.description.abstractMicrocontaminations of copper and silver on n-type silicon wafer surfaces were investigated by performing a series of electrochemical polarization measurements in 5% hydrofluoric acids and ethanol solutions in the absence and presence of various concentrations of copper and/or silver. The metallically contaminated wafer surfaces were characterized by scanning electron microscopy. It was revealed that the open-circuit potentials shifted to a more anodic direction and the corrosion current densities increased significantly when either copper or silver was present in solutions, and these became more pronounced when both copper and silver were introduced simultaneously into solutions. The polarization resistance showed a sensitive linear decrease with an increase of copper or silver concentrations, a strong indication of an accelerated electrochemical reaction. The contaminated wafer surfaces were covered by metallic nanocrystallites due to copper and silver deposition from solutions. When both copper and silver were present, the nanocrystallites coagulated with each other and various clusters were formed by combination with metallic atoms. As the concentration of copper and/or silver increased, the amounts of metallic nanocrystallites also increased, this, in turn, further promoted metallic microcontaminations and ultimately led to rougher wafer surfaces. (C) 2003 The Electrochemical Society.zh_CN
dc.language.isoenzh_CN
dc.publisherELECTROCHEMICAL SOC INCzh_CN
dc.titleMicrocontamination of silicon wafer surfaces by copper and silverzh_CN
dc.typeArticlezh_CN


Files in this item

Thumbnail

This item appears in the following Collection(s)

Show simple item record