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dc.contributor.authorQi, Zhengbing
dc.contributor.authorHuang, Ruoxuan
dc.contributor.authorZhu, Fangping
dc.contributor.authorSun, Peng
dc.contributor.authorWang, Zhoucheng
dc.contributor.author王周成
dc.date.accessioned2012-03-23T06:49:49Z
dc.date.available2012-03-23T06:49:49Z
dc.date.issued2010-10
dc.identifier.citationMATERIALS PROCESSING TECHNOLOGIES, PTS 1 AND 2,2011,154-155:1664-1667zh_CN
dc.identifier.issn1022-6680
dc.identifier.urihttp://dx.doi.org/doi:10.4028/www.scientific.net/AMR.154-155.1664
dc.identifier.uriWOS:000289011500319
dc.identifier.urihttps://dspace.xmu.edu.cn/handle/2288/11854
dc.description.abstractThe effect of deposition temperature on microstructure and mechanical properties of ZrN coatings fabricated by DC magnetron sputtering was investigated. X-ray diffraction, scanning electron microscope, nanoindentation and scratch test were applied to characterize the ZrN coatings. The results show that with the increasing of substrate temperature the preferred orientation of the coating changed from (111) to (200), the ZrN crystalline phase almost disappeared at 600 degrees C resulting from nitrogen loss and the formation of ZrO(2) phase. From 50 degrees C to 450 degrees C, the coatings showed columnar structure, and at 600 degrees C the columnar disappeared, presenting equiaxed structure instead. The hardness of coatings showed few significant variations under 450 degrees C, and at 600 degrees C the coating hardness dropped for the low crystallinity and ZrO(2) phase softening. The substrate-coating adhesion decreased with the increasing of temperature before 450 degrees C, and then followed by an elevation at 600 degrees C.zh_CN
dc.language.isoenzh_CN
dc.publisherTRANS TECH PUBLICATIONS LTDzh_CN
dc.subjectZrNzh_CN
dc.subjectcoatingzh_CN
dc.subjectsubstrate temperaturezh_CN
dc.subjectorientationzh_CN
dc.subjectmechanical propertieszh_CN
dc.titleEffect of Substrate Temperature on Structure and Mechanical Properties of ZrN Coatingszh_CN
dc.typeArticlezh_CN


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