Concentration protile of etchant measured by microelectrode technique in the process of chemical micromachining
Date
2006Author
Tang, Jing
汤儆
Ma, Xinzhou
马信洲
He, Huizhong
何辉忠
Zhang, Li
张力
Lin, Mixuan
林密旋
Qu, Dongsheng
曲东升
Ding, Qingyong
丁庆勇
Sun, Lining
孙立宁
Collections
- 化学化工-已发表论文 [14469]
Abstract
A carbon-disk microelectrode was used to investigate the surface concentration profile of etchant Br-2, which was electrogenerated on the Pt working electrode. The steady state reducing currents of Br-2 at different distances away from the Pt electode was measured. The concentration profile was estimated from the current-distance variation curves as a function of different sampling times. Experimentally determined concentration profiles are in good agreement with those estimated from the microetching results. The microelectrode technique has offered a good method to choose suitable etching solution for chemical micromachining.