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Concentration protile of etchant measured by microelectrode technique in the process of chemical micromachining

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微圆盘电极技术测定表面化学微加工时的约束刻蚀剂浓度分布.pdf (124.3Kb)
Date
2006
Author
Tang, Jing
汤儆
Ma, Xinzhou
马信洲
He, Huizhong
何辉忠
Zhang, Li
张力
Lin, Mixuan
林密旋
Qu, Dongsheng
曲东升
Ding, Qingyong
丁庆勇
Sun, Lining
孙立宁
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  • 化学化工-已发表论文 [14469]
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Abstract
A carbon-disk microelectrode was used to investigate the surface concentration profile of etchant Br-2, which was electrogenerated on the Pt working electrode. The steady state reducing currents of Br-2 at different distances away from the Pt electode was measured. The concentration profile was estimated from the current-distance variation curves as a function of different sampling times. Experimentally determined concentration profiles are in good agreement with those estimated from the microetching results. The microelectrode technique has offered a good method to choose suitable etching solution for chemical micromachining.
Citation
ACTA PHYSICO-CHIMICA SINICA,2006 ,22(4):507-512
URI
https://dspace.xmu.edu.cn/handle/2288/10762

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