辉光放电质谱技术应用进展

Abstract

对辉光放电质谱(gdMS)在金属与半导体、非导体、薄层与深度分析、分子信息分析方面的应用和一些新装置、新方法进行了综述.着重介绍了近20年来我国学者在辉光放电质谱方面的成就,并结合国际上的报道对该领域的发展现状进行了总结.

Giving insight into the superior performance of glow discharge mass spectrometry(GDMS), a wide variety of applications using this technique, such as metal, semiconductor, nonconductor, depth profiling and molecular information analysis are attracting great interests.In this article, these applications are reviewed.Some new devices and new methods are also introduced.Emphasis is put on the Chinese scholars' achievements in recent 20 years.Besides, the developments of GDMS have been summarized and prospected.