表面涂层对掺杂α-Fe_2O_3烧结型气敏元件敏感特性的影响

Abstract

本文对掺杂α-fE_2O_3烧结型气敏元件的表面涂上混合α-Al_2O_3和Mn_2O_3(粒径<2μM)的浆料,干燥烧结而成新型半导体气敏元件,测试了该气敏元件对甲烷,丁烷,乙酵气体的敏感顺序,阻温特性和长期稳定性。

The surFace of doped α-Fe2O3 sintered sensitive element are coated with mixing paste of α-A12O3 and Mn2O3 (particle size < 2μm ) , dried and sintered in air, Formed a new semiconductor sensitive element.Its sensitivity to methane, isobutane,ethyl alcohol are determined.Temperature dependamce of resistanoe and long-term stability of the sensitive element are also measured.