射频板条激光器反射镜变形自适应补偿的有限元仿真研究
Research on the Finite Element Simulation of the Adaptive Compensation to the Distortion of the Reflecting Mirror
Abstract
针对射频板条CO2激光器所采用的非稳-波导混合腔反射镜热变形问题。利用有限元分析法仿真得出了反射镜的热变形和温度分布,并提出了一种背面多热丝同步加热自适应补偿方法。结果表明,加热补偿方法可将反射镜的曲率变形从0.16%降低到0.02%以内,并获得了不同激光功率下的补偿曲线。 Aiming to the distortion of the reflecting mirror in the unstable waveguide mixing resonator on the radio-frequency stimulated slab CO2 laser,a method of synchronously heating compensation for the mirror was established by simulating and analyzing the temperature distribution and distortion of the reflecting mirror using the method of finite element analysis.The curvature rate distortion was reduced from 0.16%to less than 0.02%.And the relation curve of the synchronously heating compensation with the variation of the laser power was obtained.