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dc.contributor.author林杰
dc.contributor.author林立伟
dc.contributor.author郭航
dc.date.accessioned2016-05-17T02:45:18Z
dc.date.available2016-05-17T02:45:18Z
dc.date.issued2014-7-28
dc.identifier.citation厦门大学学报(自然科学版),2014,(4):56-61
dc.identifier.issn0438-0479
dc.identifier.otherXDZK201404011
dc.identifier.urihttps://dspace.xmu.edu.cn/handle/2288/105829
dc.description.abstract提出了一种三轴高g的压阻式微加速度计的设计方法.通过理论推导和计算,分析了模型的应力和频率,得到了具有较高频率的高g微加速度计的结构参数.通过有限元软件AnSyS分析确定了在获得高输出电压条件下的电阻布置方案.在此基础上,对三轴进行了200 000 g载荷下的性能研究,结果表明所设计的微加速度计具有较高的灵敏度和线性度.
dc.description.abstractThis paper presents a method of designing a tri-axial high-gpiezo-resistive micro-accelerometer.First,the equivalent mechanics model of the micro-accelerometer is set up,and then the theoretical analysis of stress and frequency are conducted to obtain the structure parameters.Furthermore,FEM in ANSYS is used to determine the positions of piezo-resistors to gain a better output voltage signal.In the end,the performance of the micro-accelerometer is studied under 200 000 gloads in three axis,and results show that the presented micro-accelerometer is associated with high sensitivity and high linearity in the high-genvironment.
dc.description.sponsorship航空基金(2008ZH68002); 教育部新世纪优秀人才支持计划(2007NCET-07-0723)
dc.language.isozh_CN
dc.subject三轴
dc.subject高g
dc.subject压阻
dc.subject微加速度计
dc.subject仿真
dc.subjecttriaxial
dc.subjecthigh-g
dc.subjectpiezoresistive
dc.subjectmicroaccelerometer
dc.subjectsimulation
dc.title三轴高g压阻式微加速度计的设计
dc.title.alternativeDesign of a Triaxial High-g Piezoresistive Microaccelerometer
dc.typeArticle


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