白光干涉解调光纤MEMS压力传感器

Abstract

为了在强电磁干扰、高温、高压等恶劣环境下实现压力的测量,进一步提高传感器的小型化并降低其制作成本,提出并设计了一种基于白光干涉解调的光纤法布里-珀罗压力传感器,实现了传感器的压力测量.基于微机电系统技术,采用光刻、阳极键合以及化学腐蚀的方法制作了以硅和玻璃构成的法布里-珀罗腔体,使用二氧化碳激光器对法布里-珀罗腔体与光纤进行焊接.基于白光干涉解调技术,利用斐索干涉仪与法布里-珀罗腔体的互相关关系对传感器进行了解调,并做了压力实验.实验结果表明:传感器在120~300kPA范围内具有较高的腔长变化灵敏度和线性度,分别为9.012 7nM/kPA和99.9%;传感器分辨率为0.1nM,重复性为0.1%.研究成果对低成本、高一致性光纤f-P传感器的批量制作具有一定的参考价值.

In order to achieve the measurement of the pressure in the harsh environment of strong electromagnetic interference,high temperature,high pressure,to further improve the miniaturization of sensors and reduce the cost of sensors,an optic fiber micro electro mechanical systems pressure sensor based on white light interferometry was produced.Fabry-Perot(F-P)cavity composed of silicon and glass was producted by the means of lithography,anodic bonding and chemical etching which was based on micro electro mechanical systems technology.F-P cavity with optical fibers were welded together through the carbon dioxide laser.The sensor was demodulated by the cross-correlation relationship between Fizeau interferometer and F-P cavity which is based on white-light interferometry techniques.Pressure sensor experimental was done,and the experimental results show that the sensor has a high sensitivity and linearity of 9.012 7nm/kPa and 99.9%,respectively,the repeatability of sensor is 0.1%.The study has guiding significance for the production of low-cost and high-consistency fiber FP sensors.