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dc.contributor.author郭建来
dc.contributor.author刘畅
dc.contributor.author王建艳
dc.contributor.author林杰
dc.contributor.author郭航
dc.date.accessioned2016-05-17T02:44:53Z
dc.date.available2016-05-17T02:44:53Z
dc.date.issued2013-07-28
dc.identifier.citation厦门大学学报(自然科学版),2013,52(235):76-81
dc.identifier.issn0438-0479
dc.identifier.otherXDZK201304014
dc.identifier.urihttps://dspace.xmu.edu.cn/handle/2288/105713
dc.description.abstract运用AnSyS对圆盘谐振器的结构进行有限元分析,并结合集总参数模型,确定了圆盘谐振器锚点尺寸与位置对圆盘谐振器性能的影响,包括谐振频率,振幅与品质因子(Q).在此基础上,提出了一种在圆盘谐振器高阶模式的节点环处做锚点的方案,不仅可以使圆盘谐振器工作在更高的谐振频率,同时也降低了微加工精度的要求.
dc.description.abstractFinite element method(FEM) in ANSYS is used to analyze the structure of disk micromechanical resonator.Especially,FEM combined with the lumped parameter model,are used to study effect of size and position of the disk micromechanical resonator on its vibration amplitude,frequency and quality factor Q.The results show that the size and position of the anchor of the disk micromechanical resonator can greatly affect its performance.Based on these studies,a new disk micromechanical resonator is proposed.It works in higher order vibration mode and takes nodal circle of the mode shape instead of the disk center as anchor.With this improvement,the disk micromechanical resonator can be even more easily fabricated since the anchor effect is greatly weakened,which leads to lower precision requirements on microfabrication.
dc.description.sponsorship航空科学基金项目(2008ZH68002)
dc.language.isozh_CN
dc.subject微机械圆盘谐振器
dc.subject集总参数模型
dc.subject有限元
dc.subject锚点
dc.subject品质因子
dc.subject高阶谐振模式
dc.subjectdisk micromechanical resonator
dc.subjectlumped parameter model
dc.subjectFEM
dc.subjectanchor
dc.subjectquality factor
dc.subjecthigher order vibration mode
dc.title微机械圆盘谐振器的结构分析
dc.title.alternativeStructural Analysis of Disk Micromechanical Resonator
dc.typeArticle


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