Show simple item record

dc.contributor.author柯晓龙
dc.contributor.author刘建春
dc.contributor.author黄海滨
dc.contributor.author郭隐彪
dc.date.accessioned2016-05-17T02:44:42Z
dc.date.available2016-05-17T02:44:42Z
dc.date.issued2013-08-15
dc.identifier.citation重庆理工大学学报(自然科学),2013,27(266):40-44
dc.identifier.issn1674-8425
dc.identifier.otherCGGL201308009
dc.identifier.urihttps://dspace.xmu.edu.cn/handle/2288/105664
dc.description.abstract针对光学非球面元件精密面形测量的需要,提出了一种大尺寸精密检测平台的测量与控制技术。通过讨论检测平台离线测量原理,采用高精度直线电机、0.1μM接触式/非接触式测量传感器以及自主开发测量评价软件为核心的软硬件控制方案,完成了大尺寸精密检测平台的设计与搭建,并针对光学非球面元件的测量特点,开发了配套的测量软件,以实现大口径光学非球面元件的面形测量与评价。光学非球面元件的测量实验结果表明:该检测系统可以有效地应用于非球面表面形貌的精密测量。
dc.description.abstractAccording to the requirement of precision measurement for optical aspheric surface,this paper presents a measuring and control means,which is based on large scale high-precision measurement platform.Through analyzing the off-machine measuring principle,a large scale measurement platform included high-precision linear motors,contacting and non-contacting measurement sensor of 0.1um resolution and a new developed of measuring software,is designed and built.Aiming at the measurement characteristics of optical aspheric lens,measuring software is developed to achieve surface metrology and evaluation for large scale optical aspheric lens.The experiment results indicated that the measuring system has met the needs of high-precision measurement.
dc.description.sponsorship福建省自然科学基金资助项目(2012J05102); 厦门理工学院高层次人才引进项目(YKJ11029)
dc.language.isozh_CN
dc.subject光学非球面
dc.subject检测平台
dc.subject离线测量
dc.subject大尺寸
dc.subject高精度
dc.subjectoptical aspheric lens
dc.subjectmeasurement platform
dc.subjectoff-machine measurement
dc.subjectlarge scale
dc.subjecthigh-precision
dc.title基于光学非球面的大尺寸精密检测平台技术
dc.title.alternativeStudy on Large Scale Precision Measurement Platform for Optical Aspheric Lens
dc.typeArticle


Files in this item

Thumbnail

This item appears in the following Collection(s)

Show simple item record