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dc.contributor.author陈雪
dc.contributor.author王纯子
dc.contributor.author黄凯
dc.contributor.author康俊勇
dc.date.accessioned2016-05-17T02:44:28Z
dc.date.available2016-05-17T02:44:28Z
dc.date.issued2013-03-28
dc.identifier.citation厦门大学学报(自然科学版),2013,52(233):18-22
dc.identifier.issn0438-0479
dc.identifier.otherXDZK201302005
dc.identifier.urihttps://dspace.xmu.edu.cn/handle/2288/105597
dc.description.abstract采用真空蒸发的方法制备了掺杂原子比为3%、5%和9%的lA掺杂和dy掺杂的znO薄膜.用扫描电子显微镜(SEM)、X射线衍射(Xrd)谱和X射线光电子能谱(XPS)表征了所制得的znO薄膜的特性.发现所有薄膜都沿C轴取向优先生长.在对znO薄膜气敏特性的测量中,在低温条件下掺杂znO薄膜的电阻比非掺杂znO薄膜的小,且对乙醇和丙酮的灵敏度显著增强,且其中dy掺杂的znO薄膜的气敏特性较lA掺杂的znO薄膜为高.而空气中暴露9个月后的薄膜的气敏特性表明掺杂znO薄膜具有很好的稳定性.同时讨论了气敏传感机制和掺杂行为对薄膜灵敏度的影响.
dc.description.abstractLa and Dy-doped ZnO thin films were prepared via vacuum evaporation method at mass fraction of 3%,5% and 9% dopi ng.The obtained films were characterized by scanning electron microscopy(SEM),X-ray diffraction(XRD) and X-ray photoelectron spectroscopy(XPS).The results indicated that all films showed a preferred C-axis growth orientation.Compared with undoped ZnO thin films,the doped films exhibited a downshift of resistance at a low temperature and remarkable increase of sensitivity to ethanol and acetone vapour,and the sensitivity of Dy-doped ZnO thin films were higher than the sensitivity of La-doped ZnO thin films.The films were then exposed bare in air for 9 months and the sensitivity was remeasured.All the films remained the sensitivity at a high level which indicated an excellent stability.The sensing mechanism and the effect of doping behaviour were also discussed.
dc.description.sponsorship国家重点基础研究发展计划(973)项目(2011CB301905;2012CB619301); 国家自然科学基金项目(61108064;61227009); 中央高校基本科研业务费专项(2010121056)
dc.language.isozh_CN
dc.subject薄膜
dc.subject传感器
dc.subjectLa掺杂
dc.subjectDy掺杂
dc.subject乙醇
dc.subjectthin film
dc.subjectsensors
dc.subjectLa doped
dc.subjectDy doped
dc.subjectethanol
dc.titleDy~(3+)和La~(3+)掺杂ZnO薄膜的特点及其气敏传感特性
dc.title.alternativeCharacteristics and Gas Sensing Properties of ZnO Thin Films Doped by Dy~(3+) and La~(3+)
dc.typeArticle


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