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dc.contributor.author郑炜
dc.contributor.author刘晋春
dc.date.accessioned2016-05-17T02:44:26Z
dc.date.available2016-05-17T02:44:26Z
dc.date.issued2012
dc.identifier.citation电加工与模具,2012,(4):49-52
dc.identifier.issn1009-279X
dc.identifier.otherDJGU201204013
dc.identifier.urihttps://dspace.xmu.edu.cn/handle/2288/105587
dc.description.abstract分析了扫描隧道显微镜的两种工作模式,即“恒高度模式“和“恒电流模式“,并以扫描探针显微镜在实际加工中的成功应用为例,说明原子级加工技术在理论和实践上是可行的。
dc.description.abstractTwo kinds of operation mode of scanning tunneling microscope(STM) are analyzed,i.e.,constant-height mode and constant-current mode for STM.Successful applications of practical nanofabrication for scanning probe microscope are taken for examples,show that it is feasible for nanofabrication technology in both theory and practice.
dc.language.isozh_CN
dc.subject原子级加工
dc.subject特种加工
dc.subject纳米技术
dc.subjectnanofabrication
dc.subjectnontraditional machining
dc.subjectnanotechnology
dc.title原子级加工技术的研究
dc.title.alternativeResearches on Technology of Atomic Nanofabrication
dc.typeArticle


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