Deposition of Large-Area and Protective Diamond-like Carbon Coatings on Glass Substrates by Low-Pressure Dielectric Barrier Discharges
- 物理技术－已发表论文 
Large-area (370mm x 500mm) diamond-like carbon (DLC) films were deposited on the glass substrate by low-pressure dielectric barrier discharges. The deposited DLC films were hard, homogeneous and extremely smooth. The DLC film deposited on the large-area glass can be potentially used as a scratch resistant and corrosion barrier layer.