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dc.contributor.authorJiang Li-Min
dc.contributor.author蒋利民
dc.contributor.authorHuang Xuan-Min
dc.contributor.author黄选民
dc.contributor.authorTian Zhong-Qun
dc.contributor.author田中群
dc.contributor.authorTian Zhao-Wu
dc.contributor.author田昭武
dc.date.accessioned2011-07-10T15:51:03Z
dc.date.available2011-07-10T15:51:03Z
dc.date.issued2006
dc.identifier.citationCHEMICAL JOURNAL OF CHINESE UNIVERSITIES-CHINESE,2006,27(8):1540-1544zh_CN
dc.identifier.issn0251-0790
dc.identifier.urihttps://dspace.xmu.edu.cn/handle/2288/10069
dc.description.abstractThis work aims to develop confined etchant layer technique (CELT) to fabricate three-dimensional (3D) microstructures of aluminum substrate for microelectromechanical systems (MEMS). In spite of the fact that LIGA technique is current method for metal bulk micromachining with a high aspect ratio, it is extremely difficult to be applied to aluminum because the electrodeposition as one of the process for LIGA is not suitable for using molten salt at a high temperature. The important feature of CELT is to use a scavenger in solution to efficiently consume the etchant so as to confine the etchant as an ultrathin layer on the working electrode surface (mold electrode). The outer boundary of the diffusion layer of the etchant can retain the three-dimensional fine micro-pattern of the mold electrode. The key issue. to successful fabrication of microstructures with CELT is the design of an appropriate "generating-scavenging" system for etchant. In the present study, NaNO2 was electrochemically oxidized into HNO3 so as to etch the aluminum workpiece. The thickness of H+ diffusion layer was confined by reacting with NaOH as the scavenger. The etched pattern of aluminum was observed to be approximately the negative copy of the mold with the precision of 504 nm. The chemical and electrochemical processes were analyzed. The influences of processing parameters, such as current density and scavenger concentration, were discussed. Our; preliminary result demonstrates that CELT has a potential to be developed as an effective technique for micromachining 3D microstructures of aluminum, which can be applied for fabrication of micro electromechanical systems.zh_CN
dc.language.isozhzh_CN
dc.publisherHIGHER EDUCATION PRESSzh_CN
dc.subjectconfined etchant layer techniquezh_CN
dc.subjectmicro electromechanical systemzh_CN
dc.subjectaluminiumzh_CN
dc.subjectmicromachiningzh_CN
dc.subjectelectrochemistryzh_CN
dc.titleInvestigation of microstructure-machining on aluminium surface by confined etchant layer techniquezh_CN
dc.typeArticlezh_CN


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